Wafer holding apparatus

Details Wafer holding apparatus Wafer holding apparatus

1995-05-15

1996-05-28

Bucci, David A.

Material or article handling

Vertically swinging load support

Grab

901 33, 901 37, 901 47, 417730, 417738, 417941, 2941191, 294907, B65G 4790

Patent

active

055205011

ABSTRACT:
A wafer holding apparatus comprises a susceptor unit having wafer support grooves where wafers are detachably fixed, a plurality of chuck claws so provided as to be movable by air cylinders relative to a chuck body and adapted to hold the outer edge of the wafer, a transfer arm for transferring the chuck body to a predetermined position, and an automatic position correcting device for automatically correcting the positions of the chucks relative to the wafer support groove.

REFERENCES:
patent: 4260187 (1981-04-01), Bejczy
patent: 4479673 (1984-10-01), Inaba et al.
patent: 4823736 (1989-04-01), Post et al.
patent: 4886361 (1989-12-01), Furstenau
patent: 4886412 (1989-12-01), Wooding et al.
patent: 4904153 (1990-02-01), Iwasawa et al.
patent: 5116181 (1992-05-01), Severns et al.
patent: 5163729 (1992-11-01), Borcea et al.
patent: 5181823 (1993-01-01), Hussey et al.
Fairchild Inc. CCD3000 Camera Brochure "Video Comm. Camera Automation Camera Series"; copywright 1982; Fairchild Camera & Instrument Corp, Palo Alto, CA. 94304.

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