Wafer holder with spindle assembly and wafer holder actuator

Details Wafer holder with spindle assembly and wafer holder actuator Wafer holder with spindle assembly and wafer holder actuator

1996-06-26

1998-12-22

Kramer, Dean

Handling: hand and hoist-line implements

Grapple

Pivoted jaws

294 88, 294115, 294907, 414941, 34 58, B25J 1510, B25B 514

Patent

active

058510419

ABSTRACT:
An improved wafer holder with spindle assembly and wafer holder actuator is disclosed. In one embodiment, the vertical motion of a shaft drives an arm positioning member in a rotational motion. The arm positioning member is coupled to a first position of an arm such that the arm moves in a horizontal motion when the arm positioning member rotates. A substrate holding member is coupled to the arm at a second position, such that the horizontal motion of the arm moves the substrate holding member between an open and a closed position. The shaft of the above described embodiment is moved in a vertical motion by an actuator. A first cylinder of the actuator expands and engages a spring which moves the shaft upward and a second cylinder of the actuator retracts to disengage the first cylinder thereby moving the shaft downward.

REFERENCES:
patent: 4313266 (1982-02-01), Tam
patent: 4651440 (1987-03-01), Karl
patent: 4696503 (1987-09-01), Collodel
patent: 4723503 (1988-02-01), Yuda
patent: 4735452 (1988-04-01), Nemoto
patent: 5520501 (1996-05-01), Kouno et al.
patent: 5549444 (1996-08-01), Dubuit
patent: 5566466 (1996-10-01), Hearne
A.H. Higginson and K.H. Stokes "Disk Support For Spin Drying" IBM Technical Disclosure Bulletin vol. 18, No. 6, Nov. 1975 pp. 1979-1980.

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