Wafer holder for wafer prober and wafer prober equipped with...

Details Wafer holder for wafer prober and wafer prober equipped with... Wafer holder for wafer prober and wafer prober equipped with...

2005-11-29

2010-12-21

Tang, Minh N (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07855569

ABSTRACT:
The invention provides a wafer-prober wafer holder that allows positional precision and temperature uniformity to be increased, and also allows the chip to be heated and cooled rapidly, and a wafer prober device provided with the same. The wafer-prober wafer holder of the invention is constituted by a chuck top having a chuck top conducting layer on its surface, and a support member for supporting the chuck top, and has a cavity in a portion between the chuck top and the support member. The chuck top preferably is provided with a heating member.

REFERENCES:
patent: 7397648 (2008-07-01), Otaka et al.
patent: 2007/0046306 (2007-03-01), Awazu et al.
patent: 2007/0046307 (2007-03-01), Itakura et al.
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patent: 2004-153288 (2004-05-01), None
patent: 2004-172463 (2004-06-01), None
patent: 2004-214690 (2004-07-01), None

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