Wafer holder

Details Wafer holder Wafer holder

2011-04-12

2011-04-12

Velez, Roberto (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

Reexamination Certificate

active

07923990

ABSTRACT:
A wafer holder is provided which includes a holder body with a chuck table having a ring-like wafer receptacle, and a plurality of fixing portions fixing a wafer on the wafer receptacle to hold the wafer, and a carrier supporting the wafer before fixed on the wafer receptacle from downward. The holder body includes a carrier support portion which forms a support face to support the carrier and be changeable in height from an original position, and positions the support face on which the wafer is placed at a delivery position. The carrier support portion separates the wafer from the carrier by lowering the support face from the delivery position, so that the fixing portions fix the wafer.

REFERENCES:
patent: 6137303 (2000-10-01), Deckert et al.
patent: 2003-324143 (2003-11-01), None

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