Wafer having chips for determining the position of the wafer by

Details Wafer having chips for determining the position of the wafer by Wafer having chips for determining the position of the wafer by

1983-09-30

1986-01-14

Anderson, Bruce C.

Radiant energy

Means to align or position an object relative to a source or...

G01N 2300

Patent

active

045647640

ABSTRACT:
A wafer having chips for determining the position of the wafer, at least one of the chips comprising a plurality of first-direction line groups formed on one side portion of the chip and a plurality of second-direction line groups formed on the other region of the chip, the first-direction line groups and the second-direction line groups being orthogonal to each other, each of the first-direction line groups comprising one first-direction main mark and one first-direction code mark expressing the position of the one first-direction main mark, each of the second-direction line groups comprising one second-direction main mark and one second-direction code mark, whereby, by scanning only one of the first-direction line groups and only one of the second-direction line groups by means of an electron beam, the position of the wafer is determined.

REFERENCES:
patent: 3849659 (1974-11-01), O'Keefe
patent: 4125418 (1978-11-01), Vinton
patent: 4327292 (1982-05-01), Wang et al.

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