Wafer-handling tool

Details Wafer-handling tool Wafer-handling tool

1982-03-11

1983-10-18

Marbert, James B.

Handling: hand and hoist-line implements

Detachable lifter

Sliding graspers

294 312, B05C 1302

Patent

active

044102097

ABSTRACT:
A special tool designed for picking up and holding circular silicon wafers, the tool incorporating a spring-biased plunger. As the plunger is withdrawn by the spring, a grooved tip at the end of the extended plunger engages one edge of the wafer, driving the opposite edge of the wafer into an arcuate groove on an opposing surface of the body of the tool.

REFERENCES:
patent: 754250 (1904-03-01), Solomon
patent: 910190 (1909-01-01), Gossett
patent: 987238 (1911-03-01), Kersten
patent: 2678000 (1954-05-01), Scheidt et al.
patent: 3482476 (1969-12-01), Tonksley
patent: 3496807 (1970-02-01), Jones et al.
patent: 3741602 (1973-06-01), Ploeckelmann
patent: 3918756 (1975-11-01), Saville

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