Wafer handling system

Details Wafer handling system Wafer handling system

2003-03-25

2011-10-04

Wilson, Lee D (Department: 3727)

Work holders

Work holder for electrical circuit assemblages or wiring...

C414S222040, C034S058000, C118S728000

Reexamination Certificate

active

08028978

ABSTRACT:
A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier. Wafer retainers on the carrier pivot to better secure wafers within the carrier.

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