Wafer handling system

Details Wafer handling system Wafer handling system

1989-04-17

1990-11-27

Werner, Frank E.

Material or article handling

Article reorienting device

118729, 118500, 414752, B65G 4724

Patent

active

049732170

ABSTRACT:
This invention relates to apparatus for pre-aligning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .theta. from a desired orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.

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patent: 4566726 (1986-01-01), Correnti et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4818169 (1989-04-01), Schram

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