Wafer handling system

Material or article handling – Article reorienting device

Patent

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Details

118729, 118500, 414752, B65G 4724

Patent

active

049732170

ABSTRACT:
This invention relates to apparatus for pre-aligning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .theta. from a desired orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.

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