Wafer handling system

Details Wafer handling system Wafer handling system

1991-11-12

1993-03-16

Werner, Frank E.

Material or article handling

Article reorienting device

414737, 414225, 414416, 414752, B65G 4724

Patent

active

051939720

ABSTRACT:
This invention relates to apparatus for prealigning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .THETA. from a desired orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.

REFERENCES:
patent: 4328553 (1982-05-01), Fredriksen
patent: 4402613 (1983-09-01), Daly et al.
patent: 4407627 (1983-10-01), Sato et al.
patent: 4425075 (1984-01-01), Quinn
patent: 4457664 (1984-07-01), Judell et al.
patent: 4539695 (1985-09-01), La Flandra
patent: 4566726 (1986-01-01), Corventi et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4818169 (1989-04-01), Schram
Semiconductor Production Publication-Autumn, 1980-pp. 31-33.

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