Wafer handling system

Details Wafer handling system Wafer handling system

1990-09-04

1992-02-04

Werner, Frank E.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414754, 414416, B65G 4724

Patent

active

050855581

ABSTRACT:
This invention relates to a method and apparatus for prealigning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .THETA. from a desired orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.

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patent: 4402613 (1983-09-01), Daly et al.
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patent: 4457664 (1984-07-01), Judell et al.
patent: 4501527 (1985-02-01), Jacoby et al.
patent: 4539695 (1985-09-01), La Fiandra
patent: 4566726 (1986-01-01), Correnti et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4818169 (1989-04-01), Schram

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