Wafer handling station

Material or article handling – Device for emptying portable receptacle – Nongravity type

Patent

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Details

29759, 1983461, 414331, 414404, B65G 106, B65G 1732

Patent

active

047010967

ABSTRACT:
The disclosed wafer handling system includes an input port, an input queue, and output port, and an output queue. The input and output queue each include a vertical elevator assembly capable of storing plural carriers representing multiple tube-loads of wafers input in the input port and into the output queue. A ferriswheel having multiple tube-load storage means is cooperative with an input waling beam and the input queue for arraying the plural carriers therein in multiple tube-loads of wafers each at different intermediate storage locations. A vertical transfer sub-assembly is cooperative with the ferriswheel and with a computer-controlled robot arm for transferring the wafers from each tube-load of carries to quartzware maintained by an inclinable transfer pad defining an elevator-transport access port. An output walking beam is cooperative with the vertical transfer mechanism and the robot for placing processed wafers back in their original tube-load of carriers and for delivering them to the multiple tube-load output queue. The inclinable transfer pad includes movable surfaces for preventing surface contact induced product cross-contamination. Air flow patterns are so produced that positive and negative pressures cooperate to reduce air-borne contamination.

REFERENCES:
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patent: 4014428 (1977-03-01), Ossbahr
patent: 4336438 (1982-06-01), Uehara et al.
patent: 4500407 (1985-02-01), Boys et al.
patent: 4534695 (1985-08-01), Stump et al.
patent: 4558984 (1985-12-01), Garrett
patent: 4568234 (1986-02-01), Lee et al.
patent: 4603897 (1986-08-01), Foulke et al.
patent: 4615430 (1986-10-01), Satoh
patent: 4621967 (1986-11-01), Masada

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