Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent
1997-01-17
2000-03-14
Werner, Frank E.
Material or article handling
Movable rack having superposed, charge-supporting elements,...
Rack moved vertically by elevating means
41433118, 414282, 414222, 414935, 414281, 118728, B65G 110
Patent
active
060364262
ABSTRACT:
Wafer handling apparatus includes a plurality of holding stations arranged in an upstream-to-downstream order and devices to treat the wafers held at the stations. Cyclically operative wafer shifting devices engage the wafers, simultaneously remove the engaged wafers during that cycle from the holding stations, shift the engaged wafers downstream relative to said holding stations and then simultaneously redeposit the wafers onto the holding stations. Thus, each wafer redeposited on a cycle of the wafer shifting devices is disposed at a holding station downstream from the holding station occupied by such wafer before that cycle of the shifting devices. Wafer supply and removal devices are provided for introducing and removing the wafers to and from the holding stations after they are treated. A method of handling wafers among a plurality of holding stations is also disclosed.
REFERENCES:
patent: 4381965 (1983-05-01), Maher, Jr. et al.
patent: 4722298 (1988-02-01), Rubin et al.
patent: 4744715 (1988-05-01), Kawabata
patent: 4775281 (1988-10-01), Prentakis
patent: 4778331 (1988-10-01), Kimata et al.
patent: 4886412 (1989-12-01), Wooding et al.
patent: 4917556 (1990-04-01), Stark et al.
patent: 4955775 (1990-09-01), Ohkase et al.
patent: 5054988 (1991-10-01), Shiraiwa
patent: 5178639 (1993-01-01), Nishi
patent: 5180273 (1993-01-01), Sakaya et al.
patent: 5183370 (1993-02-01), Cruz
patent: 5207548 (1993-05-01), Suffel
patent: 5297910 (1994-03-01), Yoshioka et al.
patent: 5314294 (1994-05-01), Taniguchi et al.
patent: 5356261 (1994-10-01), Nishi
patent: 5364222 (1994-11-01), Akimoto et al.
patent: 5397213 (1995-03-01), Ushiki
patent: 5399531 (1995-03-01), Wu
patent: 5430271 (1995-07-01), Orgami et al.
patent: 5460478 (1995-10-01), Akimoto et al.
patent: 5615988 (1997-04-01), Wiesler et al.
patent: 5697749 (1997-12-01), Iwabuchi et al.
Creative Design Corporation
Werner Frank E.
LandOfFree
Wafer handling method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Wafer handling method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer handling method and apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-163014