Wafer handling apparatus and method

Details Wafer handling apparatus and method Wafer handling apparatus and method

1983-01-27

1985-07-16

Spar, Robert J.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414404, 414225, B65G 4790

Patent

active

045293538

ABSTRACT:
Compact apparatus characterized by cleanliness of operation, high throughput and low cost is designed for automatically loading and unloading wafer-carrying trays that are designed to be mounted in the reaction chamber of a processing system. A key component of the apparatus comprises a unique wafer vacuum chuck.

REFERENCES:
patent: 3823836 (1974-07-01), Cheney et al.
patent: 3986623 (1976-10-01), Keller
patent: 4056198 (1977-11-01), Boserup
patent: 4298443 (1981-11-01), Maydan
patent: 4378189 (1983-03-01), Takeshita et al.

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