Wafer handling apparatus

Details Wafer handling apparatus Wafer handling apparatus

1984-06-04

1986-07-01

Spar, Robert J.

Material or article handling

Movable rack having superposed, charge-supporting elements,...

Rack moved vertically by elevating means

74102, 74107, 414416, 414744B, 414752, B65G 106

Patent

active

045977089

ABSTRACT:
A wafer handler featuring a carriage movable along a rail path, the carriage supporting an upright rotatable arm with a cantilevered wafer chuck. Elevators for raising and lowering trays containing wafer stacks are disposed on either side of the rail path. Each elevator has a curved track section which may be interposed along the rail path. The upright arm has a track follower, parallel to a boom supporting the wafer chuck and freely movable along the rail path, except when it encounters a curved track section. In this instance, the track follower will follow the curved track section, causing rotation of the arm, boom and wafer chuck, bringing the chuck into the wafer stack at an elevation determined by the elevator. In this manner, motion in the X, Y and Z planes may be provided for stacked wafers over extended distances.

REFERENCES:
patent: 3834555 (1974-09-01), Bennington et al.
patent: 4004681 (1977-01-01), Clewett et al.
patent: 4342535 (1982-08-01), Bartlett et al.
patent: 4388034 (1983-06-01), Takahashi
patent: 4501527 (1985-02-01), Jacoby et al.
patent: 4509635 (1985-04-01), Emsley et al.

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