Wafer handling and placement tool

Details Wafer handling and placement tool Wafer handling and placement tool

1986-10-30

1988-01-05

Cherry, Johnny D.

Handling: hand and hoist-line implements

Grapple

Resilient jaws

294 33, 294902, B25B 902, H01L 2168

Patent

active

047171901

ABSTRACT:
A spring arm tool is provided for clamp engaging and supporting wafers while the tool is hand held. The tool includes a pair of relatively swingable jaw element supporting support arms and the jaw elements are notched to enjoy multiple point contact with a wafer peripheral portion. Also, one disclosed form of the tool includes remotely operable workpiece ejecting structure carried by the jaw elements thereof.

REFERENCES:
patent: 619949 (1899-02-01), Flynn
patent: 1062464 (1913-05-01), Haynes
patent: 1266112 (1918-05-01), Ferdon
patent: 1634856 (1927-07-01), Skroch
patent: 3291476 (1966-12-01), Calkin
patent: 3496807 (1970-02-01), Jones et al.
patent: 3665790 (1972-05-01), Jones
patent: 4452106 (1984-06-01), Tartaglia
Western Electric Technical Digest, No. 66, Apr. 1982, "Tool for Disc-Like Articles" by Eckert et al.

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