Wafer handler

Details Wafer handler Wafer handler

1987-05-22

1988-09-27

Marbert, James B.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

294 643, B25J 1506

Patent

active

047736879

ABSTRACT:
A wafer handling technique allows for picking up a wafer from its front side. One or more vacuum ports pull the periphery of the wafer into contact with a ledge raised from a broad surface, providing a friction force that prevents lateral movement of the wafer. A port in the broad surface of the handler flows pressurized gas onto the wafer, thereby preventing contact between the handler and the interior of the wafer. The handler may be sized to be relatively thin, and to cover less than half of the surface of the wafer, thereby allowing for readily loading wafers back-to-back in a furnace boat.

REFERENCES:
patent: 3431009 (1969-03-01), Mammel
patent: 3523706 (1970-08-01), Logue
patent: 4002254 (1977-01-01), Olofsen
patent: 4029351 (1977-06-01), Apgar et al.
patent: 4118058 (1978-10-01), Rahn et al.
patent: 4445494 (1984-05-01), Schiele et al.
patent: 4566726 (1986-01-01), Correnti et al.
IBM Technical Disclosure Bulletin, vol. 22, No. 8A, Jan. 1980, pp. 3370-3. 1
IBM Technical Disclosure Bulletin, vol. 22, No. 5, Oct. 1979, "Diverted Flow Bernoulli Pick-Up Device", W. Balder & R. Cachon.
IBM Technical Disclosure Bulletin, vol. 16, No. 10, Mar. 1974, "Wafer Handler Assembly", A. G. Vokali.

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