Wafer gripper

Details Wafer gripper Wafer gripper

1995-09-13

1997-12-23

Cherry, Johnny D.

Handling: hand and hoist-line implements

Grapple

Slideable jaws

294902, 414941, 901 39, B25J 1508

Patent

active

057000468

ABSTRACT:
A wafer gripper assembly comprises first and second gripping members movably supported relative to each other. A motor propels the gripping members linearly towards and away from each other. Preferably both gripping members are movably supported, and a rotary-to-linear translator produces equal and opposite linear movement of the gripping members. Typically, at least six contactor elements are defined on the pair of gripping members. The contactor elements include a vertically extending portion having an inwardly facing convex surface for contacting an edge of a wafer, and an inwardly extending flange for supporting a lower surface of the wafer.

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Van Doren, Matthew J., Precision Machine Design for the Semiconductor Equipment Manufacturing Industry, Massachusetts Institute of Technology, May 1995.

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