Material or article handling – Vertically swinging load support – Grab
Patent
1987-02-09
1988-10-18
Spar, Robert J.
Material or article handling
Vertically swinging load support
Grab
269 21, 269 71, 414737, 414779, B66C 100
Patent
active
047783320
ABSTRACT:
Apparatus is disclosed for automatically transferring a semiconductor wafer between a horizontal and a vertical plane, beginning and ending in precisely located positions. A wafer support arm is carried by a transfer member which also includes a motor for rotating the support arm between a "start" position and an intermediate position in a horizontal plane. Another motor is provided for rotating the transfer member to position the support arm in a vertical plane. The wafer support arm is then returned to its original position relative to the transfer member, thus establishing a "finish" position in the vertical plane.
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Byers William
Kochersperger Peter
Grimes Edwin T.
Masseller Francis L.
Murphy Thomas P.
Smith P. McCoy
Spar Robert J.
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