Wafer fabrication robotic interface unit

Details Wafer fabrication robotic interface unit Wafer fabrication robotic interface unit

1993-04-19

1995-10-03

Downs, Robert W.

Robots

Counterbalance

395 88, 395 93, 395912, 901 10, 901 16, G06F 1500, H05K 330, B23P 1900

Patent

active

054558948

ABSTRACT:
An improved wafer transfer and monitoring system is described which utilizes a robotic interface unit. The robotic interface unit includes at least one wafer storage location placed proximate to a wafer stepper unit. A robotic arm attached to the interface unit is moveable in three dimensions to move wafers between the wafer storage location and the wafer stepper unit. The robotic interface unit can be placed between a wafer stepper unit and a coater/developer unit to transfer wafers between each unit and to store and monitor wafers placed upon the units and/or upon the wafer storage location. Accordingly, the robotic interface unit can operate in a stand-alone configuration with the wafer stepper or can be integrated between a wafer stepper and a wafer coater/developer. By using a robotic arm, less contaminates are associated with the exposed and readily cleaned arm. As such, the robotic interface unit and integrated system can be used in class I wafer fabrication areas where cleanliness is important, and the ability to track and monitor wafers is also important.

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