Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Patent
1988-10-06
1991-01-08
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With plural means for supplying or applying different fluids...
134 99, 134102, 134200, 2391021, 239422, 137835, B08B 302
Patent
active
049827537
ABSTRACT:
A wafer stripping, cleaning and etching apparatus includes a bowl, a table in the bowl carrying cassette of wafers, and a spray post with multiple fluid passages and ports directing fluid spray against the wafers.
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Grebinski, Jr. Thomas J.
Stephenson Samuel H.
National Semiconductor Corporation
Stinson Frankie L.
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