Wafer etching, cleaning and stripping apparatus

Details Wafer etching, cleaning and stripping apparatus Wafer etching, cleaning and stripping apparatus

1988-10-06

1991-01-08

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

134 99, 134102, 134200, 2391021, 239422, 137835, B08B 302

Patent

active

049827537

ABSTRACT:
A wafer stripping, cleaning and etching apparatus includes a bowl, a table in the bowl carrying cassette of wafers, and a spray post with multiple fluid passages and ports directing fluid spray against the wafers.

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patent: 4132567 (1979-01-01), Blackwood
patent: 4151955 (1979-05-01), Stouffer
patent: 4157161 (1979-06-01), Bauer
patent: 4161356 (1979-07-01), Giffin et al.
patent: 4167193 (1979-09-01), Magnus et al.

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