Wafer engine

Details Wafer engine Wafer engine

2006-06-27

2006-06-27

Brahan, Thomas J. (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C414S749400, C414S937000, C901S017000

Reexamination Certificate

active

07066707

ABSTRACT:
An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.

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