Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
Reexamination Certificate
2005-08-23
2005-08-23
Barlow, John E. (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Orientation or position
C414S935000, C414S936000
Reexamination Certificate
active
06934661
ABSTRACT:
A method for detecting wafer flat shift, and an apparatus (500) having two sensors (506a) and (506b) in a power supply circuit (600) for wafer fabrication equipment, the sensors (506a) and (506b) detecting a shift in wafer flat position from a desired position and shutting off the wafer fabrication equipment.
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patent: 4880348 (1989-11-01), Baker et al.
patent: 5452521 (1995-09-01), Niewmierzycki
patent: 5483138 (1996-01-01), Shmookler et al.
patent: 5725664 (1998-03-01), Nanbu et al.
Chen Po-Ming
Chiang Ming-Ji
Yang Ji-Shen
Yuen Jean-Hua
Barlow John E.
Dougherty Anthony T.
Duane Morris LLP
Taiwan Semiconductor Manufacturing Co. Ltd.
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