Wafer detecting device wherein light receiver has an effective s

Details Wafer detecting device wherein light receiver has an effective s Wafer detecting device wherein light receiver has an effective s

1987-12-29

1988-11-22

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

G01N 2186, G01V 904

Patent

active

047868163

ABSTRACT:
A wafer detecting device usable with a carrier has a plurality of wafer carrying portions disposed in stories for carrying wafers thereon. The device comprises a light emitting portion for emitting a light beams so that it passes through the carrier from one side thereof to the other side thereof and in a direction substantially parallel to a plane in which a wafer is carried on a wafer carrying portion of the carrier. A light receiving portion is disposed at the other side of the carrier for detecting presence/absence of the light passed through the carrier. The light emitting portion is arranged to emit the light over a dimensional range covering all the wafer carrying portions with respect to a direction in which the wafer carrying portions are disposed in stories, and the light receiving portion is fixed relative to the carrier and has a light receiving surface having an effective dimensional range greater than the dimensional range covering all the wafer carrying portions with respect to the direction in which the wafer carrying portions are disposed in stories.

REFERENCES:
patent: 3700121 (1972-10-01), McManus
patent: 3824020 (1974-07-01), Pease
patent: 3902615 (1975-09-01), Levy et al.
patent: 4238780 (1980-12-01), Doemens
patent: 4259019 (1981-03-01), Johannsmeier et al.
patent: 4619573 (1986-10-01), Rathmann et al.
patent: 4625666 (1986-12-01), Sick

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