Wafer detecting device

Details Wafer detecting device Wafer detecting device

2008-05-27

2008-05-27

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500, C356S239100

Reexamination Certificate

active

07379174

ABSTRACT:
Provided is a detecting device for an FIMS system, for easily and simply detecting a slip-out of a glass wafer from an FOUP or detective storage thereof. The detecting device includes a light transmission sensor and a light reflection sensor. A light emitting portion of the light reflection sensor, a light receiving portion thereof, and one of a light emitting portion of the light transmission sensor and a light receiving portion thereof are disposed on one surface side of a substrate to be detected in a position in which the substrate is located. The other of the light emitting portion of the light transmission sensor and the light receiving portion thereof is disposed on the other surface side of the substrate to be detected in the position in which the substrate is located.

REFERENCES:
patent: 3792930 (1974-02-01), Obenreder
patent: 3871773 (1975-03-01), Shaw, Jr.
patent: 5243402 (1993-09-01), Weber et al.
patent: 5443164 (1995-08-01), Walsh et al.
patent: 5754294 (1998-05-01), Jones et al.
patent: 5780849 (1998-07-01), Kikuchi
patent: 6013920 (2000-01-01), Gordon et al.
patent: 6053983 (2000-04-01), Saeki et al.
patent: 6082949 (2000-07-01), Rosenquist
patent: 6097204 (2000-08-01), Tanaka et al.
patent: 6138721 (2000-10-01), Bonora et al.
patent: 6175645 (2001-01-01), Elyasaf et al.
patent: 6188323 (2001-02-01), Rosenquist et al.
patent: 6220808 (2001-04-01), Bonora et al.
patent: 6281516 (2001-08-01), Bacchi et al.
patent: 6298280 (2001-10-01), Bonora et al.
patent: 6364745 (2002-04-01), Gonzalez-Martin et al.
patent: 6390754 (2002-05-01), Yamaga et al.
patent: 6396072 (2002-05-01), Meyhofer et al.
patent: 6618136 (2003-09-01), Ishida
patent: 6642997 (2003-11-01), Yamada
patent: 2003/0067603 (2003-04-01), Horie
patent: 3-159233 (1991-07-01), None
patent: 5-38876 (1993-05-01), None
patent: 5-291382 (1993-11-01), None
patent: 8-213447 (1996-08-01), None
patent: 9-237810 (1997-09-01), None
patent: 10-308438 (1998-11-01), None
patent: 11-3297 (1999-01-01), None
patent: 11-31738 (1999-02-01), None
patent: 11-214483 (1999-08-01), None
patent: 11-233595 (1999-08-01), None
patent: 2000-133697 (2000-05-01), None
patent: 2000-223554 (2000-08-01), None
patent: 2001-56210 (2001-02-01), None
patent: 2001-516152 (2001-09-01), None
patent: 2001-284439 (2001-10-01), None
patent: 2002-9133 (2002-01-01), None
patent: 2002-164411 (2002-06-01), None
patent: 2002-246358 (2002-08-01), None
patent: 2003-100852 (2003-04-01), None
patent: 2003-197705 (2003-07-01), None
patent: 2003-273197 (2003-09-01), None
patent: 2003-289097 (2003-10-01), None
patent: WO 99/13498 (1999-03-01), None

Affiliated with

Also associated with

Rating

Wafer detecting device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer detecting device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer detecting device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2798541