Abrading – Work feeder – Ejector or unloader
Patent
1997-09-30
1999-02-02
Scherbel, David A.
Abrading
Work feeder
Ejector or unloader
451331, 414937, B24B 4106
Patent
active
058656707
ABSTRACT:
Wafer demount apparatus automatically demounts and transports a polished semiconductor wafer to an inspection station. The apparatus includes a bridge located between a polishing block supporting wax-mounted wafers and an offload conveyor. The bridge fills the gap and provides a smooth transition surface for the wafers moving from the polishing block to the conveyor. The bridge is also capable of movement to achieve vertical and horizontal alignment with the polishing block.
REFERENCES:
patent: 4944119 (1990-07-01), Gill, Jr. et al.
patent: 5095661 (1992-03-01), Gill, Jr. et al.
"Wafer Demount Station", 1 page, no date.
Bronson Francis Richard
Durkee Roger Paul
Frank Kenneth Abraham
Heim Richard William
McDonald Shantese
MEMC Electronic Materials , Inc.
Scherbel David A.
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