Wafer counter having device for aligning wafers

Details Wafer counter having device for aligning wafers Wafer counter having device for aligning wafers

1991-03-20

1993-02-02

Bucci, David A.

Material or article handling

Article reorienting device

Article frictionally engaged and rotated by relatively...

414417, 414433, 414DIG2, B65G 4724

Patent

active

051833786

ABSTRACT:
A wafer counter device comprising a system for aligning the orientation flats of plural wafers in a cassette with one another and a system provided with optical sensors for detecting whether or not the wafers are present in the cassette and serving to count the number of the wafers in the cassette on the basis of the result detected by the optical sensors. The wafers aligning system includes aligning rollers contacted with the rims of the wafers to rotate the wafers, a system for lifting the aligning rollers in such a way that the rollers can be contacted with the rims of the wafers, and a motor for rotating the aligning rollers.

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patent: 5007788 (1991-04-01), Asano et al.

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