Wafer conveyor system

Details Wafer conveyor system Wafer conveyor system

1996-08-14

1999-09-21

Ip, Paul

Electricity: motive power systems

Positional servo systems

Program- or pattern-controlled systems

318640, 36442402, 414786, G06F 1300, G06F 1550

Patent

active

059558571

ABSTRACT:
A wafer conveyor system and controlling method therefor sends/receives a semiconductor wafer to/from a designated place includes a stocker for storing and delivering a package box with a plurality of wafers therein, a transferring path for connecting one stocker with another stocker, a carrier traveling along the transferring path for transporting the package box between the stockers, an automatic charging device placed to any one position of the transferring path for charging a battery loaded onto the carrier traveling along the transferring path when the battery is discharged, and a central control unit for controlling the driving of the stocker, transferring path, carrier and automatic charging device.

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