Wafer conveying apparatus with alignment mechanism

Details Wafer conveying apparatus with alignment mechanism Wafer conveying apparatus with alignment mechanism

1985-09-04

1987-01-13

Little, Willis

Geometrical instruments

Area integrators

Electrical

331845, 33533, 33573, G01B 525, G01B 1127

Patent

active

046353739

ABSTRACT:
A wafer pre-alignment apparatus including a mechanical pre-alignment device for positioning a wafer on the basis of an outer periphery configuration of the wafer, an image processing pre-alignment device for positioning the wafer on the basis of a pattern of an image formed on the wafer the image processing aligner being effective to perform the pre-alignment operation with a higher accuracy than the mechanical aligner, and a selector for operating the apparatus selectively in a first mode wherein the mechanical aligner only is operated for the wafer and in a second mode wherein the image processing aligner only is operated for the wafer, or the mechanical aligner and the image processing aligner are operated sequentially for the wafer.

REFERENCES:
patent: 3589079 (1971-06-01), Beasley
patent: 4005651 (1977-02-01), Sigel et al.
patent: 4414749 (1983-11-01), Johannsmeier
patent: 4563824 (1986-01-01), Baun

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