Wafer container with removable sidewalls

Details Wafer container with removable sidewalls Wafer container with removable sidewalls

2005-05-03

2005-05-03

Ricci, John A. (Department: 3714)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

Reexamination Certificate

active

06886696

ABSTRACT:
A wafer container suitable for the storage and/or transport of multiple IC wafers. The container includes a wafer holder provided with multiple, upward-standing sidewalls, at least one of which is removable to enable horizontal as well as vertical removal of the IC wafers from the wafer holder and prevent collisions which may otherwise occur between the wafer being removed and the sidewalls. The inner, wafer-engaging surface of each of the sidewalls may include a flexible material or pad for preventing scratching and/or chipping of the wafers during wafer storage, transport and/or removal.

REFERENCES:
patent: 4787508 (1988-11-01), Wu et al.
patent: 5366079 (1994-11-01), Lin et al.
patent: 5454468 (1995-10-01), Chou et al.
patent: 5551571 (1996-09-01), Lin et al.
patent: 5611448 (1997-03-01), Chen
patent: 5699916 (1997-12-01), Liang
patent: 5788082 (1998-08-01), Nyseth
patent: 6533123 (2003-03-01), Nakamura et al.

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