Wafer container with purgeable supporting module

Details Wafer container with purgeable supporting module Wafer container with purgeable supporting module

2008-09-01

2011-11-01

Reynolds, Steven A. (Department: 3788)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S710000

Reexamination Certificate

active

08047379

ABSTRACT:
A wafer container includes a container body, formed by a pair of side walls, a top surface, and a bottom surface, on one sidewall of which is formed with an opening and on the other sidewall opposite to the opening is formed with a back wall, a supporting module being disposed on each of said sidewall for supporting a plurality of wafers; and a door joining with opening of the container body with its inner surface for protecting the plurality of wafers within the container body, the characteristic in that: a purgeable supporting module is respectively disposed between each side wall of the container body and the back wall, a long slot is further disposed on the side of purgeable supporting module facing the opening, and an air inlet is further disposed on one end of the purgeable supporting module for being connected to an gas valve, wherein the purgeable supporting module is formed by a plurality of supporting ribs vertically arranged at intervals.

REFERENCES:
patent: 5879458 (1999-03-01), Roberson et al.
patent: 5890598 (1999-04-01), Hayashida et al.
patent: 6098809 (2000-08-01), Okada et al.
patent: 6099302 (2000-08-01), Hong et al.
patent: 6736268 (2004-05-01), Nyseth
patent: 6899145 (2005-05-01), Aggarwal
patent: 7009689 (2006-03-01), Chiu
patent: 2006/0011507 (2006-01-01), Uchida et al.
patent: 2006/0283774 (2006-12-01), Hasegawa

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