Wafer container with cushion sheet

Details Wafer container with cushion sheet Wafer container with cushion sheet

2009-07-08

2010-10-26

Pickett, J. Gregory (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S509000

Reexamination Certificate

active

07819252

ABSTRACT:
A wafer container with wafer-mounting cushion sheets prevents breaking and damage of semiconductor wafers due to impacts or repetitive warping by maintaining the semiconductor wafer in a flat state and enables the semiconductor wafer to be removed safely and easily without damage. The surface of each wafer-mounting cushion sheet includes a self-sucking portion for exerting a removable vacuum on the semiconductor wafer and a non-sucking portion for enabling separation of the semiconductor wafer.

REFERENCES:
patent: 7588150 (2009-09-01), Kasama
patent: 2002/0144927 (2002-10-01), Brooks et al.
patent: 2009/0038987 (2009-02-01), Hyobu
patent: 2009/0050518 (2009-02-01), Kasama
patent: 10-050815 (1998-02-01), None
patent: 2003-168731 (2003-06-01), None
patent: 2005-191419 (2005-07-01), None
patent: 2009-170780 (2009-07-01), None
International Search Report (in English), mailed Feb. 12, 2008.
Written Opinion of the International Searching Authority (with English translation), mailed Feb. 12, 2008.
International Preliminary Report on Patentability issued Jul. 28, 2009.

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