Wafer container having the purging valve

Details Wafer container having the purging valve Wafer container having the purging valve

2011-05-31

2011-05-31

Bui, Luan K (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C118S715000, C141S089000, C141S098000, C220S745000

Reexamination Certificate

active

07950524

ABSTRACT:
A wafer container includes a container body, a door, and a purging valve, wherein the purging valve is disposed in the through hole of the container body. The purging valve includes a fixed sleeve body, a purging head, an elastic component, and a valve lid. The fixed sleeve body comprises a base, and a lower opening is formed at the center of the base for the purging head to be disposed therein. The purging head comprises a bottom portion and a hollow sleeve portion protruding upward from the bottom portion, wherein the hollow sleeve portion is surroundingly disposed with elastic component and with vent disposed on its circumference wall. The valve lid is disposed on top of the hollow sleeve portion so that the purging head can move from the first position to the second position inside the fixed sleeve body when being propped up by an upward force.

REFERENCES:
patent: 4532970 (1985-08-01), Tullis et al.
patent: 4534389 (1985-08-01), Tullis et al.
patent: 5320218 (1994-06-01), Yamashita et al.
patent: 5755332 (1998-05-01), Holliday et al.
patent: 6042651 (2000-03-01), Roberson et al.
patent: 7201276 (2007-04-01), Burns et al.
patent: 7328727 (2008-02-01), Tieben et al.
patent: 7866480 (2011-01-01), Burns et al.
patent: 2003/0047562 (2003-03-01), Wu et al.
patent: 2005/0077204 (2005-04-01), Sumi et al.

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