Wafer container for storing integrated circuit wafers

Details Wafer container for storing integrated circuit wafers Wafer container for storing integrated circuit wafers

1998-10-28

1999-11-02

Fidei, David T.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206303, B65D 8530

Patent

active

059753080

ABSTRACT:
A cuboid wafer container consists of a top bucket and a bottom bucket. The top bucket further consists of a square bucket and a cylindrical bucket, the same does the bottom bucket. The cylindrical bucket and the square bucket are connected through cushion to absorb vibration for protect the wafers from being damaged by the vibration. The wafer container according to the invention can be opened and sealed without screwing the buckets, so that damages occurred on the surfaces of wafers is reduced.

REFERENCES:
patent: 3926308 (1975-12-01), Sullivan
patent: 4555024 (1985-11-01), Voss et al.
patent: 5454468 (1995-10-01), Chou et al.
patent: 5551571 (1996-09-01), Lin et al.
patent: 5699916 (1997-12-01), Liang

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