Wafer container and wafer aligning apparatus

Details Wafer container and wafer aligning apparatus Wafer container and wafer aligning apparatus

1993-10-05

1995-11-21

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414936, 414937, 414940, 414217, 414754, 414939, 414757, 118719, 118500, G01P 1300

Patent

active

054681120

ABSTRACT:
A container for storing a plurality of semiconductor wafers comprises two end walls and two side walls. The container has a main opening through which the wafers are inserted into or withdrawn from the container and a sub-opening through which a wafer counter approaches the wafers. A plurality of slots are formed in the container to hold the wafers one by one at intervals. Each slot includes a pair of grooves which are formed in inner surfaces of both the side walls, have a V-shaped cross-section, and which divergently open toward a central portion of the container. One surface of each groove serves as a supporting surface on which a wafer is disposed substantially horizontal when the container is positioned such that the reference plane is horizontal. The supporting surfaces of the pair of grooves have a pair of converging portions which converge toward the second opening. A filling body, having an inner surface which is brought into contact with an edge portion of a wafer, is provided in each converging portion near the sub-opening. The inner surface of the filling body is determined so as to restrict a position of the wafer, such that the wafer can be positioned at the same height of the supporting surfaces of the pair of grooves.

REFERENCES:
patent: 4744715 (1988-05-01), Kawabata
patent: 4778331 (1988-10-01), Kimata et al.
patent: 4895486 (1990-01-01), Baker et al.
patent: 5048164 (1991-09-01), Harima
patent: 5064337 (1991-11-01), Asakawa et al.
patent: 5181819 (1993-01-01), Sukata et al.
patent: 5183378 (1993-02-01), Asano et al.

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