Wafer container

Details Wafer container Wafer container

1995-09-25

1997-03-18

Pollard, Steven M.

Receptacles

Sectional

Stacked or aligned similar sections

206445, B65D 8500

Patent

active

056114486

ABSTRACT:
An integrated circuit wafer protective container for containing IC wafers during the process of IC wafer fabrication is disclosed. The protective container comprises a wafer-containing member and a wafer-protecting and securing member. The wafer-containing member is of a substantially cylindrical shape of a tube having a closed end and an open end. The inner diameter of the wafer-containing member is suitable for containing the IC wafers. The wafer-protecting and securing member is of a substantially cylindrical shape of a tube having a closed end and open end. The inner diameter of the wafer-protecting and securing member is suitable for receiving the cylindrical body of the wafer-containing member. The wafer-protecting and securing member has a number of latching protrusions formed at its open end on the inner side wall of its cylindrical shaped tube. The wafer-containing member has a number of latching slots formed at its closed end on the exterior surface of its cylindrical shaped tube. Each of the latching protrusions mates with a corresponding one of latching slots when the cylindrical body of the wafer-containing member is fully received inside the wafer-protecting and securing member. A wafer confinement member secures a stack of IC wafers stored in the wafer containing member.

REFERENCES:
patent: 3369691 (1968-02-01), Wei
patent: 4253571 (1981-03-01), Keohan
patent: 4787508 (1988-11-01), Wu et al.
patent: 5363977 (1994-11-01), Hoff
patent: 5454468 (1995-10-01), Chou et al.

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