Material or article handling – Apparatus for charging a load holding or supporting element... – Load holding or supporting element including gripping means
Patent
1983-08-15
1987-03-03
Spar, Robert J.
Material or article handling
Apparatus for charging a load holding or supporting element...
Load holding or supporting element including gripping means
414417, 1983391, C23C 1500
Patent
active
046472665
ABSTRACT:
An elevator structure is actuated to remove wafers individually out of a storage cassette to an elevated delivery position. The elevator is a lift blade with an arcuate upper end shaped to match the curvature of the wafers, and a groove within this end adapted to match the thickness of a wafer and retain a wafer edgewise. A wafer-holding chuck on a chuck assembly is adapted to receive a wafer from the elevator when the elevator is in the elevated delivery position. The chuck assembly is movable from the delivery position to a remote position where the chuck presents the wafer to a support member. The support member is provided with an aperture and a plurality of deformable wafer-holding clips spaced around the aperture. The chuck assembly includes a pneumatic cylinder capable of contacting a portion of each clip to urge same to an open position. The invention includes an arrangement in which the chuck is mounted on a chuck assembly in the form of a door for sealing an opening in a process chamber.
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Coad George L.
Hutchinson Martin A.
Shaw R. Howard
Cole Stanley Z.
Herbert Leon F.
Muncy Ken
Spar Robert J.
Varian Associates Inc.
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