Wafer cleaning brush

Details Wafer cleaning brush Wafer cleaning brush

2007-03-06

2007-03-06

Chin, Randall (Department: 1744)

Brushing, scrubbing, and general cleaning

Machines

Wiping

C015S077000

Reexamination Certificate

active

11312179

ABSTRACT:
A semiconductor wafer scrubber has a brush with a nubless outer surface for cleaning the surfaces of a semiconductor wafer. The nubless brush has a body and rotates around a central axis as it contacts the wafer surface. The brush has a central section with an outer diameter less than the diameter of the end sections.

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