Wafer chuck

Details Wafer chuck Wafer chuck

2007-03-06

2008-08-12

Nguyen, Ha (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S758010

Reexamination Certificate

active

07411384

ABSTRACT:
A wafer chuck is provided with a plurality of pins which protrude and retreat in a plurality of through holes formed in a vertical direction on a mounting table, and an ascending/descending mechanism for ascending and descending the pins. The wafer chuck receives a wafer by protruding the pins from the mounting plane of the mounting table. On each upper end surface of the pin, a receiving surface part is provided for substantially not making a gap between the pin and each of the corresponding through holes and a mechanism for aligning the receiving surface part with the mounting surface is provided.

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“virtually.” The American Heritage® Dictionary of the English Language, Fourth Edition. Houghton Mifflin Company, 2004. Jun. 27, 2007. <Dictionary.com http://dictionary.reference.com/browse/virtually>.

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