Wafer chuck

Details Wafer chuck Wafer chuck

1985-10-29

1988-05-31

Bilinsky, Z. R.

Chucks or sockets

With fluid-pressure actuator

Socket type

279 3, B23B 3100

Patent

active

047476087

ABSTRACT:
A wafer chuck for releasably holding a wafer, includes a base member having an upper surface for carrying and holding thereon the wafer, a lift mechanism operative on the wafer when it rests on the base member to move the wafer relative to the base member in a direction away from the base member, the lift mechanism having an operative member extending substantially in a direction to a radially inward position from a radially outward position of the base member, the operative member having an end portion movable, relative to the base member, between a first position at which it is retracted from the upper surface of the base member and a second position at which it is protrudent from the upper surface of the base member so as to engage with the wafer to move the same relative to the base member, and driving means for moving, relative to the base member, the end portion of the operative member between the first and second positions.

REFERENCES:
patent: 2304899 (1942-12-01), Dupre
patent: 3740900 (1973-06-01), Youmans et al.
patent: 3977566 (1976-08-01), Hill et al.
patent: 4311427 (1982-01-01), Coad et al.
patent: 4448403 (1984-05-01), Riessland et al.

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