Wafer centering assembly

Abrasive tool making process – material – or composition – Impregnating or coating an abrasive tool

Patent

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Details

51216LP, 51237R, B24B 4702

Patent

active

050583280

ABSTRACT:
The wafer centering assembly includes a pair of pivot arms which can be pivoted simultaneously to adjust to the diameter of a conveyed wafer. Each pivot arm has a stop which arrest the motion of a wafer such that the axis of the wafer is approximately centered on the axis of a vacuum head.

REFERENCES:
patent: 774563 (1904-11-01), Clark
patent: 2019789 (1935-11-01), Mahannah
patent: 2418463 (1947-04-01), Coleman
patent: 2887918 (1959-05-01), Benson
patent: 4524959 (1985-06-01), Kubo
patent: 4638601 (1987-01-01), Steere et al.
patent: 4721198 (1988-01-01), Yajima et al.

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