Wafer center finding with charge-coupled devices

Details Wafer center finding with charge-coupled devices Wafer center finding with charge-coupled devices

2008-02-15

2010-12-28

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Position or displacement

C356S237100, C356S399000, C414S744500, C414S916000, C414S936000

Reexamination Certificate

active

07859685

ABSTRACT:
A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior of the robot chamber, the linear array positioned to acquire image data from a measurement volume in one or more predetermined locations within the robot chamber.

REFERENCES:
patent: 5982492 (1999-11-01), Oppenheimer et al.
patent: 7283255 (2007-10-01), Ramsey et al.

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