Wafer cassette transfer mechanism

Details Wafer cassette transfer mechanism Wafer cassette transfer mechanism

1986-05-05

1988-06-14

Aschenbrenner, Peter A.

Material or article handling

Elevator or hoist and loading or unloading means therefor

With external cooperating movable feeding or discharging means

414417, 414404, B65G 6500

Patent

active

047508574

ABSTRACT:
A wafer cassette transfer mechanism is disclosed which transfers a wafer cassette from a transfer arm to an elevator. The elevator moves vertically, up or down, so as to move the wafer cassette to a second transfer arm. The second transfer arm can then move the wafer cassette to after processing equipment.

REFERENCES:
patent: 3782563 (1974-01-01), Brockmeyer et al.
patent: 3964623 (1976-06-01), Verhein et al.
patent: 4203696 (1980-05-01), Lindberg
patent: 4536122 (1985-08-01), Herrmann et al.
patent: 4573851 (1986-03-01), Butler
patent: 4588341 (1986-05-01), Motoda et al.
patent: 4614474 (1986-09-01), Sudo

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