Wafer cassette rotation mechanism

Details Wafer cassette rotation mechanism Wafer cassette rotation mechanism

1997-08-26

2000-11-28

Hess, Douglas

Material or article handling

Article reorienting device

Article supporting carriage moved over fixed guideway to...

414781, 414940, B65G 4907

Patent

active

061526800

ABSTRACT:
The present invention concerns a device for the rotation of a wafer cassette such as between a horizontal orientation and a vertical orientation. The wafer cassette rotation device includes a carriage for receiving and supporting a wafer cassette, a receptacle in which the carriage is supported and rotates, and a drive mechanism for rotating the carriage together with any wafer cassette that has been inserted into the carriage, between horizontal and vertical orientations. The carriage is shaped to receive a standard wafer cassette, the carriage open at both front and top portions, includes wafer cassette supports. Wheels may be attached to opposing side edges of the bottom of the carriage. A cam drive mechanism is used to move the carriage within the receptacle.

REFERENCES:
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patent: 4674936 (1987-06-01), Bonora
patent: 4815912 (1989-03-01), Maney et al.
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5224809 (1993-07-01), Maydan et al.
patent: 5443348 (1995-08-01), Biche et al.
patent: 5507614 (1996-04-01), Leonov et al.
patent: 5525024 (1996-06-01), Freerks et al.
patent: 5738483 (1998-04-01), Terpstra

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