Wafer cassette retainer in a wafer container

Details Wafer cassette retainer in a wafer container Wafer cassette retainer in a wafer container

1999-06-04

2000-03-28

Gehman, Bryon P.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206453, 206454, 206586, 206591, B65D 8530, B65D 8105

Patent

active

060419377

ABSTRACT:
A wafer cassette retainer to be used in a wafer container including a box top with an upper inner side for positioning a wafer cassette therein. The wafer cassette retainer comprises: a fixed part, mounted on the upper inner side of the box top; and an elastic part, attached to the fixed part from below. The elastic part has several elastic plates, which form a rhomboid, and a lower side with a contact arc for contacting the wafer cassette. The elastic part is elastic against vertical deformation and is deformed by contacting the wafer cassette within the wafer container, thus holding the wafer cassette securely, independent of size and shape thereof, and absorbing shocks thereon. For increased elasticity of the elastic part, additional grooves are cut into inner corners of two opposite lateral joints between the elastic plates.

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