Wafer cassette in wafer carrier

Details Wafer cassette in wafer carrier Wafer cassette in wafer carrier

1996-10-11

1998-07-21

Sewell, Paul T.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206454, 211 41, B65D 8546

Patent

active

057823626

ABSTRACT:
A wafer cassette of a wafer carrier holds a plurality of wafer materials such as semiconductor single crystal silicon wafers. The wafer cassette is contained in a box body having a covering for transportation and storage of the silicon wafers with safety from contamination and mechanical damage. The wafer cassette is a casing have an opening in the upper and lower surfaces and having a pair of opposite side walls each of which is provided on the inner surface thereof with a plurality of alignment grooves for receiving wafer materials in parallel with each other. The wafer cassette is provided with wafer presser plates each covering the upper or lower surface in a freely demountable fashion each of which having a pair of engageable parts on two opposite sides thereof. A plurality of elastic plates are provided at the center of the plates, between the pair of the engageable parts, in alignment in the direction of the wafer materials held on the cassette. A protrusion extends from each of the elastic plates and the surface of the protrusions are engraved to form a groove having a V-shaped cross section to receive a wafer material.

REFERENCES:
patent: 4518085 (1985-05-01), Chisholm et al.
patent: 4588086 (1986-05-01), Coe
patent: 4762689 (1988-08-01), Frey et al.
patent: 5207324 (1993-05-01), Kos
patent: 5273159 (1993-12-01), Gregerson
patent: 5472099 (1995-12-01), Terashima
patent: 5575394 (1996-11-01), Nyseth

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