Wafer cassette having multi-directional access

Details Wafer cassette having multi-directional access Wafer cassette having multi-directional access

1987-03-02

1988-03-01

Britts, Ramon S.

Supports: racks

Special article

Platelike

211 594, 211189, A47G 1908

Patent

active

047279931

ABSTRACT:
A multi-wafer load lock apparatus for use in wafer processing machines provides access to wafers in an internal cassette by orthogonal wafer transport devices. A passthrough cassette comprising inwardly extending arms having a stepped portion thereon for holding a wafer enables access from orthogonal directions. An improved vacuum feedthrough actuates the cassette.

REFERENCES:
patent: 689213 (1901-12-01), Nicholson
patent: 995120 (1911-06-01), Cooper
patent: 3856472 (1974-12-01), Schweitzer et al.
patent: 4228902 (1980-10-01), Schulte

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