Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Reexamination Certificate
2005-10-11
2005-10-11
Kunemund, Robert (Department: 1722)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
For crystallization from liquid or supercritical state
C117S200000, C117S054000, C117S911000, C414S935000
Reexamination Certificate
active
06953506
ABSTRACT:
A wafer cassette comprises a holding member having a depression corresponding to the shape of the substrate, and a cover having an opening smaller than the surface size of the substrate. The substrate is to be held in the depression by means of the holding member and the cover, and the substrate is to be covered at its one-side surface, side and all peripheral region of the other-side surface, with the holding member at its depression and with the cover at the edge of its opening. Also disclosed are a liquid-phase growth system and a liquid-phase growth process which make use of the wafer cassette.
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Iwakami Makoto
Iwane Masaaki
Mizutani Masaki
Nishida Shoji
Saito Tetsuro
Canon Kabushiki Kaisha
Fitzpatrick, Cella, Harper and Scinto
Kunemund Robert
Song Matthew
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