Supports: racks – Special article – Platelike
Patent
1994-01-27
1995-12-05
Gibson, Jr., Robert W.
Supports: racks
Special article
Platelike
206454, 118500, B65B 2102
Patent
active
054720990
ABSTRACT:
A wafer cassette is provided which has a multiplicity of shelves provided in one side thereof with a notch and placed at intervals to give rise to open spaces therebetween for insertion of a wafer, provides the open spaces in the recesses thereof with buffer members severally adapted to meet in collision with part of the outer periphery of a wafer, and allows the notches in the multiplicity of shelves jointly to form an empty space for extractably admitting the leading end part of a wafer conveyor. The wafer cassette of this invention permits wafers carried on the wafer conveyor to be sent out past the leading end part of the conveyor and inserted automatically into the empty spaces formed in the cassette for insertion of wafers and stowed in the cassette after collision against the buffer members when the leading end part of the wafer conveyor (the end part on the wafer discharging side) is inserted into the empty space mentioned above and then set operating. Thus, the accommodation of individual wafers and the conveyance of a cassette as an integral unit are simultaneously materialized and the wafer processing system can be automated up to the very end thereof.
REFERENCES:
patent: 2813633 (1957-11-01), Welling
patent: 4176751 (1979-12-01), Gillissie
patent: 5044752 (1991-09-01), Thurfjell et al.
patent: 5193682 (1993-03-01), Naito et al.
patent: 5219079 (1993-06-01), Nakamura
Gibson , Jr. Robert W.
Shin-Etsu Handotai & Co., Ltd.
Snider Ronald R.
LandOfFree
Wafer cassette does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Wafer cassette, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer cassette will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1368337