Wafer carrying system

Details Wafer carrying system Wafer carrying system

2005-06-14

2005-06-14

Ricci, John A. (Department: 3714)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S832000

Reexamination Certificate

active

06905026

ABSTRACT:
The purpose of the present invention is to provide a wafer carrying system with a manual-opened cover. The wafer carrying system of the present invention includes a wafer cassette having an opening, a cover disposed on the wafer cassette for covering the opening of the wafer cassette, an opener disposed on the cover for opening the cover, a base for mounting the opener thereon, a separating device connected with the base and the opener, thereby the cover being movable from a shut position to a separated position, a first pivoting device connected to the separating device for pivoting the cover to a first specific position, and a second pivoting device connected to the first pivoting device for pivoting the cover to a second specific position.

REFERENCES:
patent: 5711427 (1998-01-01), Nyseth
patent: 5915562 (1999-06-01), Nyseth et al.
patent: 6105782 (2000-08-01), Fujimori et al.
patent: 6457598 (2002-10-01), Hsieh et al.
patent: 6622883 (2003-09-01), Wu et al.

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