Wafer carrying apparatus and wafer carrying method

Details Wafer carrying apparatus and wafer carrying method Wafer carrying apparatus and wafer carrying method

2007-02-27

2007-02-27

Dillon, Jr., Joe (Department: 3651)

Conveyors: power-driven

Conveyor section

Unit load conveying surface means moved about an endless or...

C414S935000

Reexamination Certificate

active

10792665

ABSTRACT:
A wafer carrying apparatus20for carrying intermediate products comprises: a conveyer40for carrying the intermediate products in the carrying direction; and a plurality of platforms41arranged in the conveyer40along the carrying direction of the intermediate products on the conveyer40, each platform41being capable of mounting at least one intermediate product at a position in a direction crossing the carrying direction of the intermediate products on the conveyer40.

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